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Customer case FenS Innovar Grade 1 cleanliness

Customer case FenS Innovar Grade 1 cleanliness

Innovar Cleaning Control has long been a trusted partner of FenS. Together, we strive for complete customer satisfaction. To meet the highest standards of cleanliness, we use FenS's advanced Deconex High Purity Cleaners....

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Innovar is released for cleaning to Grade 1 level

Innovar is released for cleaning to Grade 1 level

To ensure the extremely accurate writing of their EUV machines, ASML introduced the Grade 1 cleanliness level in their GSA, which stands for Generic Standard of ASML. After an intensive certification process with multiple tests Innovar has now officially been released...

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